1200/1100 deg. Laboratory Hydrogen Horizontal Tube Furnace With CVD System

The CVD system consists of a gas supply system + a tube furnace + a gas extraction system. The maximum temperature can reach 1200 degrees, 1400 degrees, 1600 degrees, and 1700 degrees. The heating zone can be single temperature zone, dual temperature zone, three temperature zone, etc., and the ultimate vacuum It can reach 10-3Pa. The gas supply system can be a proton flow meter or a float flow meter with flow adjustment. The number of gas mixing channels can be 2 channels, 3 channels, 4 channels, and 5 channels.

This CVD system is composed of a 3-way gas supply system + TL1200 hydrogen tube furnace + low vacuum system.

1200/1100 deg. Laboratory Hydrogen Horizontal Tube Furnace With CVD System

Item No.:	TF1200-H2-I	TF1200-H2-II	TF1200-H2-III	TF1200-H2-Ⅳ
Rated Power:	3.5KW	3.5KW	3.5KW	5KW
Heating Zone size (mm)(Dia. x L):	OD60 x 440mm	OD80 x 440mm	OD100 x 440mm	OD150 x 440mm
Constant temperature zone : (mm)	150	150	150	150
Furnace tube size OD (mm):	High purity quartz tube: OD 60/80/100/150*1000mm (tube diameter is optional) A furnace plug is placed at each end. The furnace plug can block the heat radiation in the center of the furnace tube and must be placed in the correct position of the furnace before heating.
Overall Dimension (WXDXH)mm:	1700X800X1500	1700X800X1500	1700X800X1500	1700X800X1500
Rated Voltage:	220V , 1 Phase.	220V , 1 Phase.	220V , 1 Phase.	220V , 1 Phase.
Heating Elements:	Domestic high quality resistance wire； Swedish Kanthal A1 imported resistance wire is optional；
Control Mode :	30-segment program temperature control: 1. The 30-segment program temperature control can only be adjusted by PID. 2. With over-temperature protection and broken couple protection, the heating circuit of the electric furnace is automatically cut off when over-temperature or broken couple; (When the temperature of the electric furnace exceeds 1200 degrees or the thermocouple is blown, the AC relay on the main circuit will be automatically disconnected, the main circuit will be disconnected, the ON light on the panel will go out, and the OFF light will be on, limited protection of the electric furnace) 3. With 485 communication interface (standard configuration when purchasing software) 4. With power-off protection function, that is, when the furnace is powered on after power-off, the program does not start from the initial temperature rise, but the furnace temperature starts to rise when the power is off. 5. The instrument has the function of temperature self-tuning.
Chamber Materials:	1. High-quality and high-purity alumina polycrystalline fiber curing furnace formed by vacuum suction filtration. 2. Using Japanese technology to form. 3. The spacing and pitch of the resistance wires in the furnace are all arranged according to the best thermal technology in Japan, and the temperature field is simulated by thermal software.
Temperature Control Mode :	Intelligent PID
Control Accuracy:	±1 ℃
Thermocouple Type:	K Type
Trigger:	Phase shift trigger
Heating rate:	≤30℃/ Min, suggest ≤15℃/ Min.
Temperature field curve	Furnace at 1000.C :
Temperature calibration (optional):	Regular temperature calibration of the tube furnace can maintain the accuracy and uniformity of the furnace temperature. You can purchase a set of simple calibration tools to assist you in this task. A complete calibration kit includes standard thermocouples, temperature calibrators, and compensation wires.
Valves and flanges:
Surface Temperature:	≤45℃
Over Temperature Protection:	Yes
Overcurrent Protection:	Yes
Broken Couple Protection:	Yes
Explosion-proof system:	The explosion-proof system consists of a pressure sensor and an explosion-proof valve. The pressure sensor can set an alarm pressure on the pressure control gauge. When the pressure in the furnace tube is greater than or equal to the set alarm pressure, the explosion-proof solenoid valve will automatically start and release the excess gas in the furnace tube. The explosion-proof solenoid valve is composed of two check valves with opposite directions, which can be closed well in vacuum or atmosphere, without air leakage and no backflow.
Hydrogen detector:	The hydrogen gas detector is a safety instrument that can detect the flammability and explosiveness of hydrogen through an imported catalytic combustion sensor. It has the characteristics of explosion-proof and dust-proof, and can be widely used in places where hydrogen is stored, used and stored in petroleum, chemical industry, metallurgy, coal mines, etc.

Gas supply system Main parameters:

Mass flowmeter:	Rate Range and gas:	5, 10, 20, 30, 50, 100, 200, 300, 500SCCM, 1, 2, 3, 5, 10SLM (you can arbitrarily select the above range and the type of gas)
	Max. pressure:	3MP
	Flow control accuracy:	±1.0%F.S
	Max. working pressure:	0.3MPa
	linear:	±0.5%F.S.
	Repeat accuracy:	±0.2% F.S
Gas Channels Qty:	1, 2, 3, 4, 5, 6, 7, 8 channels (optional)
Connector type:	Double ferrule stainless steel joint
System working pressure range:	0.1~0.5 MPa
Working temperature:	5-45℃
Pressure vacuum gauge:	-0.1~0.15MPa
Static mixing chamber:	Dia50 X 400MM
Port size:	Dia6 / 1/4”

VS-0.1 Air Extraction System: Option 1 or 2

Power:	220V
Dimensions：	650X650X600 / 650X650X300
Bellows:	KF25X1000mm
Max. Vacuum :	10 -1Pa
Vacuum flapper valve:	KF25	#colspan#
VRD-8 vacuum pump (Option I)：	Model:	VRD-8
	Ultimate partial pressure:	5X10-2 Pa
	Intake and exhaust port:	KF25
	Motor speed:	1440RPM
	Pumping rate：	2.2L/S
	Motor Power	0.4kw
Preiffer ACP15 oil-free multi-stage Roots pump (Option II):	Model：	ACP15
	power supply：	AC100-240 50/60HZ
	Power:	450w
	weight:	25kg
	Maximum helium leak rate:	5 · 10-8 Pa m3/s
	Pumping rate:	14 m3/h
	Ultimate pressure:	0.02Torr
	Inlet and exhaust interface:	KF25
Vacuum measurement: Resistance vacuum gauge (Option I):	Model:	ZDR-1
	Power:	25w
	Vacuum measurement range:	0.1-10 5 Pa
	Resistance silicon:	ZJ-52T
Vacuum measurement: Sweden (INFICON) Pirani Ceramic Capacitance Vacuum Gauge (Option II)	Model:	PCG554
	Input voltage:	24V 1A DC (with 220V transformer)
	Vacuum gauge interface:	KF16
	Digital Display:	Digital display (screen size is 20x14mm), and its data display unit is torr
	Product Size:	46mm×28mm×126mm ( L x W x H)
	weight:	5 lbs
	Detection gas：	It can detect various gases, including mixed gases, with accurate measurement and good repeatability.
	Whether it is anticorrosive：	anticorrosive
	Response time：	≤30ms
	Measuring range：	3.8×10-5 -1125 Torr.

Molecular pump unit (optional):

Unit input voltage:	380V /220V
Bellows:	KF40X1000
Vacuum flapper valve	KF40
Box Size:	600X600X600
Molecular pump (Option I)	Molecular pump model:	FJ620
	Input voltage:	380V
	Molecular pump inlet flange:	DN160
	Molecular pump pumping rate L/S (to air):	600
	Ultimate pressure of molecular pump (Pa):	6×10-7
	Cooling method:	water cooling
	Cooling water pressure (MPa):	0.1-0.2
	Cooling water temperature:	<25℃
	Ambient temperature:	0~40℃
	Recommended starting pressure:	<100pa
Molecular pump fore vacuum TRP-24 (FJ620 molecular pump must be equipped with previous stage pump):	Power:	0.75kw
	Voltage:	380V
	Rotating speed:	1450rpm
	Inlet diameter:	KF25/KF40
	Pumping rate of front machine pump (L/S):	6
	Ultimate pressure:	4X10 -2Pa
German Pfeiffer vacuum pump (Option II)	Voltage:	220V
	Power:	110W
	Air extraction interface:	KF40
	weight:	150KG
	Front pump pumping speed:	0.9m 3/ h
	Pumping rate (N2):	33L/S
Compound vacuum gauge:	Compound vacuum gauge model:	ZDF
	Power supply:	220V 55W
	control precision:	± 1%
	Vacuum gauge measuring range:	10-5 -10 5 Pa

Warranty period: One year warranty and lifetime technical support.
Note: 1. Consumable parts such as heating elements, thermocouple , quartz tubes, sample crucibles, etc. are not within the warranty period.
2. Damage caused by the use of corrosive gas and acid gas is not covered by the warranty.

Operating Notes:

1. The air pressure in the furnace tube should not be higher than 0.02MPa;
2. Due to the high internal pressure of the gas cylinder, a pressure reducing valve must be installed on the gas cylinder when gas is introduced into the furnace tube. In order to ensure safety, it is recommended that the pressure be lower than 0.02MPa;
3. The gas flow into the furnace tube must be less than 200SCCM to avoid the impact of cold air flow on the hot furnace tube;
4. For the sample heating experiment, it is not recommended to close the exhaust valve and intake valve at the flange end of the furnace tube. If you need to close the gas valve to heat the sample, you need to pay attention to the indication of the pressure gauge at all times; if the pressure indication is greater than 0.02MPa, you must open the exhaust valve immediately to prevent accidents (such as furnace tube rupture, flange flying, etc.) .

The tube furnace uses Domestic high-quality resistance wire / imported resistance wire Sweden (kanthal) as heating element, adopts double-layer shell structure and electronic temperature control instrument, can carry out 30-segment temperature control, phase shift trigger, and thyristor control. The furnace adopts oxidation Aluminum polycrystalline fiber material has the advantages of balanced temperature field, low surface temperature, fast temperature rise and fall, and energy saving. It is an ideal product for universities, scientific research institutes, and industrial and mining enterprises for high-temperature atmosphere sintering, atmosphere reduction, CVD experiments, and vacuum annealing.

Detailed description:

• Electric resistance wire and Chamber :                                                                                                                                                         Kanthal A1 resistance wire:     ;        Characteristics of Kanthal A1 resistance wire:
  (1) The surface temperature is as high as 1420℃
  (2) The surface is stainless steel color (very bright), will not rust, and will not drop slag after long use.
  (3) Balanced resistance and good temperature field balance.                                                                                                                Domestic resistance wire chamber:   ，Regular Fe-Cr-Al Alloy doped by Mo resistance wire, its heating area:  ;                                                                                                                                                                                  Imported resistance wire chamber: , Kanthal A1 resistance wire has uniform resistance, even heat generation, and better temperature field effect， its heating Area : .
• It can be connected to the computer.                                                                                                                                                                   The furnace is equipped with communication interface and software, which can directly control the various parameters of the furnace through the computer, and can observe the PV and SV temperature values on the furnace and the operation of the instrument from the computer. The actual temperature rise curve of the furnace will be drawn by the computer in real time. And it can save the temperature data at each moment, and it can be recalled at any time.                             
• Installed with air switch and leakage protector:
  When the circuit is over-current or leakage, the switch is automatically disconnected.   
• Chamber :                                                                                                                                                                      1. High-quality and high-purity alumina polycrystalline fiber curing furnace formed by vacuum suction filtration;
  2. Using Japanese technology to form;
  3. The spacing and pitch of the resistance wires in the furnace are all arranged according to Japan’s best thermal technology, and the temperature field is simulated by thermal software;
  4. Using circular heating, the temperature field is more balanced.
• Optional UL certification electrical board (all imported electrical appliances that have passed UL certification) 
• Certification：  UL, SA, TUV are ready to be certified, additional costs are required.                                                                                                       
• Stainless steel support frame：
• Flanges:      Hinge flange (optional) / flange that can be connected to resistance vacuum gauge and KF25 bellows (optional) / water-cooled flange (optional)

STANDARD ACCESSORIES 1200.C tube furnace

OPTIONAL ACCESSORIES:

• Optional 1.) Explosion-proof system: Explosion-proof system is composed of solenoid valve, microcomputer, pressure display and transmitter, 24V power supply, AC contactor, etc. The pressure in the furnace is converted into an electric signal through the pressure display and transmitter and transmitted to the microcomputer. The microcomputer compares with the set value, and then gives a signal to control the AC contactor, thereby controlling the opening and closing of the solenoid valve. When the pressure in the furnace is greater than the allowable pressure set by us, the solenoid valve will open immediately to play an anti-explosion effect. We have installed an air outlet pipe on the solenoid valve, and the user can connect the pipe to exhaust the gas outdoors, and the explosion-proof valve is one-way The valve can only exhaust gas, not return flow, which effectively guarantees the safety of the furnace.
  The explosion-proof system has many advantages:
  (1) Reusability: The solenoid valve opens when the pressure is greater than the set value, and closes when the pressure is lower than the set value. Unlike a mechanical riot control device, it cannot be used once it bursts.
  (2) The setting value is adjustable: the user can adjust the opening pressure of the solenoid valve through the microcomputer as needed.
  (3) The explosion-proof point is very sensitive: because the microcomputer and electric signal are used, it will detonate immediately when the pressure reaches the explosion-proof point.
  (4) Explosion-proof system safety: no fragments fly out during detonation. (If a mechanical type is used, the glass may fly out).
  (5) The explosion-proof system has good stability: because of the use of microcomputers and solenoid valves, it will detonate at our set point, and users can test it. Unlike the mechanical type that cannot be tested, there are many differences in whether the explosion-proof point will open or not. Certainty.
• Optional 2.) Under-pressure alarm system: When the furnace pressure is lower than a standard atmospheric pressure (the pressure value is adjustable), the electric furnace will automatically alarm to indicate that the intake air flow is insufficient, and can decide whether to cut off the heating circuit according to the needs of customers power supply.
• Optional 3.) Gas supply system: The furnace can be equipped with 2 or 3 float flow meters, which can control the gas flow rate. Each inlet has a stainless steel valve. You can choose one of them or Several channels are used to adjust the gas. The gas enters the gas mixing tank after passing through the flow meter, and then enters the furnace body in 3 channels, so that the gas can flow into the furnace body evenly.
• Optional 4.) Vacuum system: The atmosphere box furnace can be pre-evacuated to speed up the cleaning of the air in the furnace.
• Optional 5.) Combustion device: The furnace can be equipped with a hydrogen burner to burn the gas discharged from the furnace.
• Optional 6.) Water cooling system: The furnace is equipped with a water cooler, which can automatically cool the road entrance.