1200/1100 deg. Laboratory Hydrogen Horizontal CVD Tube Furnace With Movable Crucible

1200/1100 deg. Laboratory Hydrogen Horizontal CVD Tube Furnace With Movable Crucible

Item No.:	TF1200-H2-I	TF1200-H2-II	TF1200-H2-III	TF1200-H2-IV	TF1200-H2-V	TF1200-H2-VI
Rated Power:	3.5KW	3.5KW	3.5KW	5KW	6KW	7KW
Heating Zone size (mm)(Dia. x L):	OD60 x 400-440mm	OD80 x 400-440mm	OD100 x 400-440mm	OD150 x 400-440mm	OD200 x 400-440mm	OD250 x 400-440mm
Constant temperature zone : (mm)	150-200mm	150-200mm	150-200mm	150-200mm	150-200mm	150-200mm
Furnace tube size OD (mm):	60×1000	80×1000	100×1000	150×1000	200×1000	250×1000
	Quartz tube: 60/80/100/150/200/250*1000mm diameter optional; A furnace plug is placed at both ends of the furnace tube. The furnace plug can block the heat radiation in the center of the furnace tube and must be placed in the correct position of the furnace before heating.
Overall Dimension (WXDXH)mm:	1200X500X700	1200X500X700	1200X500X700	1200X600X800	1200X700X900	1200X700X900
Rated Voltage:	220V , 1 Phase.	220V , 1 Phase.	220V , 1 Phase.	220V , 1 Phase.	220V , 1 Phase.	220V , 1 Phase.
Heating Elements:	Domestic high quality resistance wire； Swedish Kanthal A1 imported resistance wire is optional；
Control Mode :	30-segment program temperature control: 1. The 30-segment program temperature control can only be adjusted by PID. 2. With over-temperature protection and broken couple protection, the heating circuit of the electric furnace is automatically cut off when over-temperature or broken couple; (When the temperature of the electric furnace exceeds 1200 degrees or the thermocouple is blown, the AC relay on the main circuit will be automatically disconnected, the main circuit will be disconnected, the ON light on the panel will go out, and the OFF light will be on, limited protection of the electric furnace) 3. With 485 communication interface (standard configuration when purchasing software) 4. With power-off protection function, that is, when the furnace is powered on after power-off, the program does not start from the initial temperature rise, but the furnace temperature starts to rise when the power is off. 5. The instrument has the function of temperature self-tuning.
Chamber Materials:	1. High-quality and high-purity alumina polycrystalline fiber curing furnace formed by vacuum suction filtration. 2. Using Japanese technology to form. 3. The spacing and pitch of the resistance wires in the furnace are all arranged according to the best thermal technology in Japan, and the temperature field is simulated by thermal software.
Temperature Control Mode :	Intelligent PID
Control Accuracy:	±1 ℃
Thermocouple Type:	K Type
Trigger:	Phase shift trigger
Heating rate:	≤30℃/ Min, suggest ≤15℃/ Min.
Temperature field curve	Furnace at 1000.C :
Temperature calibration (optional):	Regular temperature calibration of the tube furnace can maintain the accuracy and uniformity of the furnace temperature. You can purchase a set of simple calibration tools to assist you in this task. A complete calibration kit includes standard thermocouples, temperature calibrators, and compensation wires.
Valves and flanges:
Surface Temperature:	≤45℃
Over Temperature Protection:	Yes
Overcurrent Protection:	Yes
Broken Couple Protection:	Yes
Open cover protection system：	When the furnace cover is opened, the relay will automatically cut off the main power supply, effectively ensuring the safety of users.
Explosion-proof system:	The explosion-proof system consists of a pressure sensor and an explosion-proof valve. The pressure sensor can set an alarm pressure on the pressure control gauge. When the pressure in the furnace tube is greater than or equal to the set alarm pressure, the explosion-proof solenoid valve will automatically start and release the excess gas in the furnace tube. The explosion-proof solenoid valve is composed of two check valves with opposite directions, which can be closed well in vacuum or atmosphere, without air leakage and no backflow.
Hydrogen detector:	The hydrogen gas detector is a safety instrument that can detect the flammability and explosiveness of hydrogen through an imported catalytic combustion sensor. It has the characteristics of explosion-proof and dust-proof, and can be widely used in places where hydrogen is stored, used and stored in petroleum, chemical industry, metallurgy, coal mines, etc.

Vacuum system (optional)：

1.  Single-stage pump TW-1.5A ：Generally used for rough vacuuming to exhaust the gas in the furnace tube.

2. Two-stage pump 2XZ-2 vacuum pump can pump the vacuum degree of the tube furnace tube to about 10Pa.

3. The VS-0.1 vacuum system can pump the vacuum in the tube furnace to 0.1Pa (and equipped with a resistance vacuum gauge display).

4.  The VS high vacuum system (the system is composed of molecular and mechanical pumps) can pump the vacuum in the tube furnace to 10-3 Pa.

5.  Constant pressure pump (this system can control the pressure in the pipe between -100.0KPa~100.0KPa).

6. UK (INFICON) capacitance vacuum gauge (measuring range 3.8×10-5 -1125 Torr, can detect various gases, including mixed gases, accurate measurement, good repeatability, optional anti-corrosion type PCG554)

7. You can purchase a cold vacuum trap from our company to avoid pollution to the vacuum pump。

Gas supply system  (Optional)：

1. Bubbler
The bubbler is particularly suitable for CVD experiments, allowing gas to enter the liquid in the tank through the gas inlet of the bubbler, bubbling the liquid (the inlet pipe nozzle is equipped with a bubbling device), thereby bringing liquid vapor into the reaction Cavity. The main body of this mixing tank is made of 316 stainless steel. The upper part of the tank is equipped with an air inlet and outlet and a mechanical pressure gauge (pressure range -0.1-0.15MPa). Two stainless steel stop valves are installed on the air inlet and outlet respectively. , Both joints adopt Φ6 ferrule joints (the joints can be connected to PTFE pipes or Dia6mm stainless steel pipes), and the pressure in the tank can withstand up to 0.15Mpa (the amount of liquid vapor increases in a positive pressure environment), At the same time, the tank can withstand a temperature of 250°C.

2. Mass flow meter gas supply system:2/3/5 or more gas channels optional;

3. Liquid evaporator
It is a system specially designed for the introduction of liquid in the CVD experiment in the laboratory. The liquid flow rate is controlled by a peristaltic pump. After the liquid is introduced into the gas mixing system by the peristaltic pump, it is heated by the heater in the system into steam. Then the hydrogen, nitrogen, or argon output from the gas supply system as the carrier gas is brought into the furnace tube. LEP can export a variety of liquids, such as: H2O, CH5OH, TiCl4r, SiHCl3, and Zn(C2H5)2, as well as a variety of organic compounds. This equipment is widely used in various CVD, catalytic reaction and activation experiments using non-corrosive liquid source steam.

Warranty period: One year warranty and lifetime technical support.
Note: 1. Consumable parts such as heating elements, thermocouple , quartz tubes, sample crucibles, etc. are not within the warranty period.
2. Damage caused by the use of corrosive gas and acid gas is not covered by the warranty.

Operating Notes:

1. The air pressure in the furnace tube cannot be higher than 0.02MPa;
2. Due to the high internal pressure of the gas cylinder, a pressure relief valve must be installed on the gas cylinder when gas is introduced into the furnace tube. In order to ensure safety, it is recommended that the pressure be lower than 0.02MPa;
3. When the temperature of the furnace body is higher than 1000℃, the furnace tube must not be in a vacuum state, and the air pressure in the furnace tube must be equal to the atmospheric pressure;
4. The gas flow into the furnace tube must be less than 200SCCM to avoid the impact of cold air flow on the hot furnace tube;
5. For the sample heating experiment, it is not recommended to close the exhaust valve and intake valve at the flange end of the furnace tube. If you need to close the gas valve to heat the sample, you must always pay attention to the indication of the pressure gauge. If the indication of the air pressure is greater than 0.02MPa, you must open the exhaust valve immediately to prevent accidents (such as furnace tube rupture, flange flying, etc.) .

The tube furnace uses Domestic high-quality resistance wire / imported resistance wire Sweden (kanthal) as heating element, adopts double-layer shell structure and electronic temperature control instrument, can carry out 30-segment temperature control, phase shift trigger, and thyristor control. The furnace adopts oxidation Aluminum polycrystalline fiber material has the advantages of balanced temperature field, low surface temperature, fast temperature rise and fall, and energy saving. It is an ideal product for universities, scientific research institutes, and industrial and mining enterprises for high-temperature atmosphere sintering, atmosphere reduction, CVD experiments, and vacuum annealing.

Detailed description:

• Electric resistance wire and Chamber :                                                                                                                                                         Kanthal A1 resistance wire:     ;        Characteristics of Kanthal A1 resistance wire:
  (1) The surface temperature is as high as 1420℃
  (2) The surface is stainless steel color (very bright), will not rust, and will not drop slag after long use.
  (3) Balanced resistance and good temperature field balance.                                                                                                                Domestic resistance wire chamber:   ，Regular Fe-Cr-Al Alloy doped by Mo resistance wire, its heating area:  ;                                                                                                                                                                                  Imported resistance wire chamber: , Kanthal A1 resistance wire has uniform resistance, even heat generation, and better temperature field effect， its heating Area : .
• It can be connected to the computer.                                                                                                                                                                   The furnace is equipped with communication interface and software, which can directly control the various parameters of the furnace through the computer, and can observe the PV and SV temperature values on the furnace and the operation of the instrument from the computer. The actual temperature rise curve of the furnace will be drawn by the computer in real time. And it can save the temperature data at each moment, and it can be recalled at any time.                             
• Installed with air switch and leakage protector:
  When the circuit is over-current or leakage, the switch is automatically disconnected.   
• Chamber :                                                                                                                                                                                    1. High-quality and high-purity alumina polycrystalline fiber curing furnace formed by vacuum suction filtration.
  2. Using Japanese technology to form.
  3. The spacing and pitch of the resistance wires in the furnace are all arranged according to the best thermal technology in Japan, and the temperature field is simulated by thermal software
  4. Using circular heating, the temperature field is more balanced
• Optional UL certification electrical board (all imported electrical appliances that have passed UL certification) 
• Certification：  UL, SA, TUV are ready to be certified, additional costs are required.                                                                                                       
• Explosion-proof system installed:
  When the pressure in the furnace tube is too high, the explosion-proof system will start and release the excess gas in the furnace tube.
• Bottom feet                                                                                                                                                                                 
• Tube block/plug:                                                                                                                                                                     
• Stainless steel support frame :                                                                                                                                   

STANDARD ACCESSORIES 1200.C Laboratory Hydrogen Horizontal CVD Tube Furnace

OPTIONAL ACCESSORIES:

Gas Supply System:	Float flow meter air supply system
	Proton flow meter gas supply system
Gas extraction system:	Vacuum Pump	TW-1.5A
		2XZ-2
		VRD-4
	Pfeiffer molecular pump
Vacuum measurement：	Resistance vacuum gauge
	Compound vacuum gauge
Bellows：	KF25
	KF40
Vacuum flapper valve：	KF25
	KF40
KF clamp：	KF25
	KF40
KF Tee joint：	KF25
	KF40